A self-consistent analytical model for non-collisional heating

نویسندگان

  • Shahid Rauf
  • Mark J Kushner
چکیده

Non-collisional heating is an important phenomenon in low-pressure inductively coupled plasmas. In this paper, a self-consistent analytical model for non-collisional heating is developed which shows that non-collisional heating is a warm-electron effect that relies on a resonant interaction of electrons with the electromagnetic wave. Electrons with velocities comparable to the effective wave phase speed resonantly interact with the wave and gain net energy from it. Collisions randomize this directed energy thereby leading to electron heating. Non-collisional heating becomes more efficient if a larger proportion of electrons participate in the resonant interaction process. This can occur due to an increase in the electron temperature or decrease in the effective wave phase speed. Collisions destroy the essential phase correlation between the electrons and the wave, making the non-collisional heating process less efficient.

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تاریخ انتشار 1997